Electromagnetoelastic Actuator for Nano Physics and Optics Sciences
DOI:
https://doi.org/10.47363/JPSOS/2020(2)115Keywords:
Electromagnetoelastic Actuator, Deformation, Regulation Characteristic, Mechanical Characteristic, Piezo Actuator, Transfer Coefficient, Matrix Transfer Function, Nano Research and ScienceAbstract
The regulation and mechanical characteristics of the electromagnetoelastic actuator are obtained for control systems in nano physics and optics sciences for scanning microscopy, adaptive optics and nano biomedicine. The piezo actuator is used for nano manipulators. The matrix transfer function of the electromagnetoelastic actuator is received for nano physics and optics sciences.
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2025-11-22
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