Electromagnetoelastic Actuator for Nano Physics and Optics Sciences

Authors

  • Afonin SM National Research University of Electronic Technology, MIET, Moscow, Russia Author

DOI:

https://doi.org/10.47363/JPSOS/2020(2)115

Keywords:

Electromagnetoelastic Actuator, Deformation, Regulation Characteristic, Mechanical Characteristic, Piezo Actuator, Transfer Coefficient, Matrix Transfer Function, Nano Research and Science

Abstract

The regulation and mechanical characteristics of the electromagnetoelastic actuator are obtained for control systems in nano physics and optics sciences for scanning microscopy, adaptive optics and nano biomedicine. The piezo actuator is used for nano manipulators. The matrix transfer function of the electromagnetoelastic actuator is received for nano physics and optics sciences. 

Author Biography

  • Afonin SM, National Research University of Electronic Technology, MIET, Moscow, Russia

    Afonin SM, National Research University of Electronic Technology, MIET, Moscow, Russia.

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Published

2025-11-22