Environmental-Friendly Fluorine Mixture for Cvd Cleaning Processes to Replace C2f6 and Nf3 under Industrial Conditions

Abstract

During the climate conference in Paris a binding and universal climate target was established. It was agreed to limit the temperature increase to a maximum of 2 C° until 2100. The most relevant climate gas is CO2, considered as a primary greenhouse gas with a significant impact on global warming. Although the semiconductor industry is only a small contributor to the global warming, several fluorinated gases having a high global warming potential (GWP), are intensively used. NF3 is the most frequently used gas, having a GWP of 17200, followed by C2F6 and CF4 with GWPs of 1200 and 7390 respectively.